Product Information

Product Information

  • Porous Chuck
  • Titanium Flange
  • Bonding Table
  • Tooling for Car Engine Valves
  • Examples

Porous Chuck

Porous Chuck Porous Chuck (Vacuum Chuck) is a part implemented in Inspection Equipment and Dicing Saw used in manufacturing process of Semiconductors. This is a product that can hold a thin Silicon Wafer flat on the table surface by using the porous structure on table surface and negative pressure. High flatness and high parallelism are required for the vacuum surface as Dicing Saw cuts Silicon Wafer at the width of about 20ƒÊm.

â Pleasae refer to "Examples" for examples of Porous Chuck.

Types of Porous Chuck

We finish our Porous Chuck at the flatness of less than 5ƒÊm on the vacuum surface as a standard. We can also support the flatness less than 3ƒÊm depending on the size and the shape of the base body. Porous Chuck is used not only for the manufacturing machine of Semiconductor but also for various measurement and inspection equipment utilizing the character to adsorb thin objects on flat surface.

ƒ|[ƒ‰ƒXƒ`ƒƒƒbƒ Plesae refer to "Porous Chuck Official Site" for more details.

We do consultation for not only Porous but also for other applied products utilizing Porous.

  • Round Type Porous Chuck

    ROund Type Porous Chuck

    Best match to adsorb Silicon Wafers, Various sizes available.

  • Square Type Porous Chuck

    Square Type Porous Chuck

    Best match to adsorb Film or Paper, Popularly used in Process and Inspections.

  • Projected Type Stage

    Projected Type Stage

    Best match to adsorb Film or Paper, Popularly used in Process and Inspections.

  • Self-Vacuum Porous Chuck

    Self-Vacuum Porous Chuck

    Stand-alone. Batter is built-in and easy handling.

  • Surface Light Porous Chuck

    Surface Light Porous Chuck

    Best match for Inspection purpose. The light can be used as backlight.

  • Heater Unit

    Heater Unit

    Best match to application with heating. Max.250 degrees C supported with vacuuming.

Specifications for Environment, Conditions and Applications

  • Shapes
    • Round Type
    • Square Type
    • Cylindrical Type
    • Special Type(Custom design supported)
  • Materials for Body
    • Stainless
    • Titanium Alloy
    • Aluminum
    • Ceramics
  • Materials for Porous
    • Ceramics
    • Stainless
    • Carbon
    • PTFE
  • Sizes
    • Round Type (ƒÓ5mm-500mm)
    • Square Type (ƒÓ5mm-350mm)
  • Surface procesing of Body
    • Fluoroesin
    • Alumite
    • LD -Rust Black Coating
    • Electroless Nickel Plating
  • Materials for Porous
    • 3ƒÊm??580ƒÊ
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